This paper studies the evolution process of different types of big science from the perspective of evolutionary dynamics, analyzes the internal and external driving forces of technological innovation of big science, and then establishes the innovation paradigm and dynamic mechanism model of big science. It is found that large-scale and intensive resource investment, effective organization, preparation of basic theory and technology, and strong external pressure are the preconditions for efficient innovation of big science; There are three main paradigms in the technological innovation of big science: realizing the scale efficiency of technological innovation through multi-path exploration and systematic organizational division of labor, promoting the emergence of disruptive innovation through fierce collision and full communication in multiple frontier fields, promoting the industrial incubation of new technology and extreme technological demand through a large number of industrial demand; The economic development level of different countries and regions, the investment level and innovation mode of big science and the promotion of big science to industry and economy have evolved into different models of big science and industrial economic development. Among them, Silicon Valley is a model of common prosperity of big science, technology and industry. The research conclusion further deepens the innovation theory of big science, and has important practical significance for China’s big science construction and the national system of new science and technology.