During the life cycle of industrial cluster, its distribution of resources and the arrangement of space evolve from chaos to order, from decentralized to agglomerate, which promotes the spatial structure of the industrial cluster from simpleness to complexity, from entity to the combination of the real and the virtual. The paper indicates that it is the intrinsic mechanism for evolvement of the industry clusters' spatial structure to have the regional spatial dynamic game among local governments at various levels, among enterprises inside and outside, and between enterprises and local government. The optimum of the clusters' spatial structure depends on the timely and exact reaction responded by the government and enterprises to the changing environment conforming the market rules. Generally, it is easier to make efficient interactions between governments and enterprises in the region with high marketization. At the same time efficient interactions also contribute to achieve the maximum benefit on the distribution of resources and the arrangement of space.