The SECI model of innovation and evolution of knowledge,which is put forward by Nonaka,has many short- comings.It could not explain the evolution phenomenon of many knowledge at the same time and the complexity of knowledge innovation.This article points out the limits of conventional SECI model from the character and evolution process of knowledge management of microelectronic.The article puts up SECI model of innovation and evolution of knowledge on the point of system theory.It establishes mathematics model and corresponding three-dimension coordi- nate.Thus illustrates the relation of epistemological,ontological,methodology and the mechanism of knowledge evolu- tion of individual,team,organization,inter-organization.It describes the model and analyzes the model from system and the character of dynamics.It also explains the complexity about evolution of knowledge.According to the model,it also points out the valuable idea about the development of microelectronic industry knowledge of China.